METHOD FOR CHEMICALLY SMOOTHENING MATERIAL AND DEVICE THEREFOR

摘要

PROBLEM TO BE SOLVED: To establish a treatment method by which the surface of a material can be flattened or the inner structure of the material can be uniformed to physically or chemically form the material having a high quality. SOLUTION: Toluene 4 is put in a beaker 5, and the beaker is then sealed with a cover 6. A thin polysilane film 1 formed on an Si substrate 2 as a material is set to the back side of the cover 6. Since the thin polysilane film 1 is exposed to toluene vapor 3 of a dissolving atmosphere in the beaker 5, the surface flattening and the inner structure uniformization of the thin polysilane film 1 is chemically induced. COPYRIGHT: (C)2009,JPO&INPIT