| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical filter which can be grounded without narrowing a visual field even when an antireflection layer consisting essentially of a fluorine monomer material is used, and to provide a plasma apparatus with the optical filter. <P>SOLUTION: The optical filter includes a transparent substrate having a main surface which has a central area and a peripheral area surrounding the central area, a first adhesive layer formed on the main surface of the central area, a first electroconductive layer formed on the first adhesive layer, a second adhesive layer formed on the first electroconductive layer, the antireflection layer formed on the second adhesive layer and a second electroconductive layer which is formed only on the surface of the peripheral area and is electrically connected to the first electroconductive layer. <P>COPYRIGHT: (C)2009,JPO&INPIT |
