发明名称 STRIPE IMAGE ANALYTICAL METHOD, INTERFEROMETER DEVICE, AND PATTERN PROJECTION SHAPE MEASURING INSTRUMENT
摘要 PROBLEM TO BE SOLVED: To provide a stripe image analytical method for extracting substantially only a desired spectrum including phase information, and thereby carrying out analysis reduced in errors. SOLUTION: This stripe image analytical method extracts the phase information, from a stripe image superposed with a carrier stripe. The method includes processes of: Fourier-transforming the stripe image to find all the spectra; subtracting other spectra excepting the desired spectrum, from all the spectra, to extract the desired spectrum; and inverse-Fourier-transforming the extracted desired spectrum to obtain the phase information. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009025259(A) 申请公布日期 2009.02.05
申请号 JP20070191530 申请日期 2007.07.24
申请人 NIKON CORP 发明人 NAKAYAMA SHIGERU
分类号 G01B9/02;G01B11/24;G01B11/25;G01J9/02 主分类号 G01B9/02
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