FILM DEPOSITION APPARATUS AND FILM DEPOSITION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a film deposition apparatus for obtaining a neutron conversion layer to be formed at the cathode of a neutron detector inserted into a nuclear reactor core and measuring neutrons in the reactor core, the apparatus generating stable plasma even under a high vacuum degree thereby providing the high quality (film quality) neutron conversion layer. SOLUTION: The film deposition apparatus 1 is composed of: a discharge electrode 2; a cylindrical grounding electrode 4 used as the cathode 33 of the neutron detector 30; a cylindrical or sleeve-shaped insulator 5 electrically insulating the discharge electrode 2 and the grounding electrode 4; a power source section 6 feeding electric power to a space between the discharge electrode 2 and the grounding electrode 4; an electrode moving section 7 moving the discharge electrode 2 and the insulator 5 in the longitudinal axial direction of the grounding electrode 4; a magnetic field generating section 8 applying a magnetic field to an electric field generated between the discharge electrode 2 and the grounding electrode 4 by electric power fed from the power source section 6; and a vacuum means 9 at least making the inside of the grounding electrode 4 vacuum. COPYRIGHT: (C)2009,JPO&INPIT