| 摘要 |
PROBLEM TO BE SOLVED: To provide a means for protecting a component of semiconductor reactor so that the component may not be damaged during substrate processing. SOLUTION: An insert member 260 is used for lining an opening 210 of a component 200 which forms a semiconductor processing reactor. In some embodiments, the reactor component defines a reactor chamber and can be made of graphite. A silicon carbide layer 230 is deposited on surfaces 240, 242, and 250 of the opening 210 of the reactor component and the insertion member is disposed in the opening. The insert member has a hole 262 for holding another reactor component such as a thermocouple 270. The insert member protects the wall of the opening from abrasion arising from insertion of the another reactor component into the opening. COPYRIGHT: (C)2009,JPO&INPIT |
