| 摘要 |
The invention relates to an anode for producing a plasma by way of electric arc discharges, starting from a target that is connected as the cathode, for coating substrates with a target material in vacuo. The aim of the invention is to find a solution allowing at least an increase in the coating rate without substantially increasing the required equipment complexity. The anode for producing a plasma by forming electric arc discharges, staring from a target that is connected as the target, is arranged at a distance to the target in a conventional manner. Anode bars that are initially parallel to the surface of the target are present on the anode. Strip elements are configured on the anode and are separated by gaps. Said strip elements start from the anode bar and point in the direction of the surface of a substrate to be coated. The plasma produced is surrounded by the strip elements of the anode on two opposite sides. |
