PATTERNED WAFER DEFECT INSPECTION SYSTEM AND METHOD

摘要

A patterned wafer defect inspection system and method is provided to detect an allowed die(acceptable die) which is rejected due to the domain deviation without interference by using a golden template hierarchy structure. In a patterned wafer defect inspection system and method, a plurality of domains is selected by a domain system(204) from a semiconductor wafer. The domain golden template corresponding to each domain is generated by the golden template system(206). A plurality of group golden templates is generated from the domain golden template by the group golden template system(208). A main golden template is generated from a plurality of group golden templates by the main golden template system(210).