发明名称 |
AMORPHOUS CARBON FILM, PROCESS FOR FORMING AMORPHOUS CARBON FILM, CONDUCTIVE MEMBER PROVIDED WITH AMORPHOUS CARBON FILM, AND FUEL CELL SEPARATOR |
摘要 |
The amorphous carbon film of the present invention is an amorphous carbon film comprising carbon and hydrogen, wherein the amorphous carbon film contains not more than 30 atomic % (excluding 0 %) of hydrogen and, when the entire amount of the carbon is taken as 100 atomic %, carbon having an sp 2 hybrid orbital is present in an amount of not less than 70 atomic % and less than 100 atomic %. Conductivity is imparted to an amorphous carbon film by controlling the contents of hydrogen, Csp 3 and the like to increase a structure comprising Csp 2 . This amorphous carbon film can be formed by plasma CVD using a reaction gas containing one or more gases selected from a carbocyclic compound gas containing carbon having an sp 2 hybrid orbital, and a heterocyclic compound gas containing carbon having an sp 2 hybrid orbital and silicon and/or nitrogen. By forming the amorphous carbon film on a surface of a substrate, a conductive member can be obtained. |
申请公布号 |
EP2020400(A1) |
申请公布日期 |
2009.02.04 |
申请号 |
EP20070744199 |
申请日期 |
2007.05.22 |
申请人 |
KABUSHIKI KAISHA TOYOTA CHUO KENKYUSHO |
发明人 |
ISEKI, TAKASHI;YAMADA, YUKA;NAKANISHI, KAZUYUKI;OSHIMA, TADASHI;MORI, HIROYUKI;HORIE, TOSHIO;SUZUKI, KEN-ICHI;KITAHARA, GAKU |
分类号 |
C01B31/02;C23C16/26;C23C16/50;H01B1/04;H01B5/14;H01B13/00;H01M8/02 |
主分类号 |
C01B31/02 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|