发明名称 |
Apparatus for manufacturing thin-film laminated member |
摘要 |
<p>An apparatus for manufacturing a thin-film laminated member by laminating a plurality of thin films on the surface of a band-shaped flexible substrate (1) includes: a substrate conveying device (10, 20, 50, 60, 70) for conveying the band-shaped flexible substrate (1) in the horizontal direction in such a manner that the widthwise direction of the band-shaped flexible substrate (1) is oriented in the vertical direction; a plurality of film forming chambers (42a-42m) arranged in succession along the direction in which the band-shaped flexible substrate (1) is conveyed for forming films on the surface of the band-shaped flexible substrate (1); and a pair of upper grip rollers (44a-44m, 46a, 46b) arranged between the plurality of film forming chambers (42a-42m) for pinching an upper edge portion of the band-shaped flexible substrate (1).</p> |
申请公布号 |
EP2020392(A2) |
申请公布日期 |
2009.02.04 |
申请号 |
EP20080013867 |
申请日期 |
2008.08.01 |
申请人 |
FUJI ELECTRIC SYSTEMS CO., LTD. |
发明人 |
YOKOYAMA, SHOJI;OUCHI, TAKASHI;NARUSE, MITSUHIRO;KAMOSHIDA, TAKASHI |
分类号 |
B65H20/02;B65H39/16 |
主分类号 |
B65H20/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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