Evaporation apparatus with inclined crucible

摘要

The invention relates to an evaporation apparatus for depositing material on a vertically oriented substrate (10). The apparatus comprises at least one evaporation crucible (100) with the evaporation crucible (100) having an evaporation surface (120) for evaporating the material (300) wherein the evaporation surface is inclined at an inclination angle (±) in relation to the horizontal. The invention further provides a method for evaporating a substrate with the steps of providing a vertically oriented substrate (10); providing a crucible having an evaporation surface (120) for evaporating a material; evaporating the material on the evaporation surface (120) that is inclined at an inclination angle (±) in relation to the horizontal.