发明名称 FABRICATION METHOD OF SUPERHYDROPHOBIC AND SUPERHYDROPHILIC SURFACES USING HIERARCHICAL PORE STRUCTURE PRODUCED BY ELECTRON BEAM IRRADIATION
摘要 A fabrication method of super hydrophobic and super hydrophilic surfaces using hierarchical pore structure produced by electron beam irradiation is provided to simply control the surface energy of a substrate chemically and physically. A hierarchic pore structure comprises a substrate(10) and a precursor(20). The precursor is formed on the top of the substrate. The precursor includes the hierarchic air bubbles by being irradiated by the electron beam(30). Hierarchic air bubbles increases the surface topology of the precursors. The hierarchic air bubbles are comprised of the air bubbles of microscopic and the air bubbles of nano size. After the electron beam is irradiated, the gradient material(40) of the surface energy is applied to the precursors.
申请公布号 KR20090012567(A) 申请公布日期 2009.02.04
申请号 KR20070076494 申请日期 2007.07.30
申请人 KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY 发明人 CHO, SUNG OH;LEE, EUN JE
分类号 H01L21/324;H01L21/20 主分类号 H01L21/324
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