APPARATUS FOR ASSEMBLING SUBSTRATES

摘要

A glass laminating apparatus is provided to shorten the process time by regulating the parallelism between the down support stand and the upper support stand under the vacuum condition. A measurement member(120) passes through a plurality of first penetration holes(112) of upper chamber(110). A upper support stand(111) is installed inside the upper chamber. A plurality of second penetration holes(113) are formed in the upper support stand. The first substrate (S1) is supported by the upper support stand. The measurement member measures the interval of a down support stand(151) and the upper support stand. The measurement member comprises a shaft(121) connected to the upper support stand, a probe, and a linear gauge(122) detecting the length of probe. An O-ring(131) is installed between the measurement member and the first penetration hole. A plane adjustable member(140) adjusts parallelism between the down support stand and the upper support stand. A lower chamber(150) faces the upper support stand of the upper chamber. A lifting operation part(160) is connected to the upper side of the lower chamber and upper chamber.