<p>This invention relates to methods of removing impurities from compounds having similar volatilities to form ultra high purity compounds by distillation in a micro device.</p>
申请公布号
EP2020257(A2)
申请公布日期
2009.02.04
申请号
EP20080160504
申请日期
2008.07.16
申请人
ROHM AND HAAS COMPANY
发明人
LIPIECKI, FRANCIS JOSEPH;MAROLDO, STEPHEN GERARD;SHENAI-KHATKHATE, DEODATTA VINAYAK;WARE, ROBERT A.
