| 摘要 |
A TFT array checking device is provided to reduce repetition time of an action of obtaining a detection signal by decreasing the number of used driving patterns, and to set a voltage condition of an energy filter according to the driving patterns, thereby cutting down time for detecting various defects of a TFT array substrate. A TFT array checking device(1) comprises as follows. An energy filter(6) performs energy selection. A secondary electron detector(3) detects a secondary electron passing through the energy filter. An electric potential of the energy filter is synchronized by signal waveform of a driving signal, and is converted. The electric potential of the energy filter is synchronized with electron ray irradiation to convert an electric potential of the energy filter as a unit for an area including plural pixels or a single pixel of a TFT array substrate that irradiates an electron ray. |
