| 摘要 |
A digital hologram microscope unit of a module structure is provided to reduce a spatial size thereof and to construct an applicable hardware system irrespective of a spatial restriction in various measurement and inspection equipment fields including an inspection unit of semiconductor equipment and an inspection unit of LCD equipment. A light source unit includes a light source(1) for outputting a laser beam, a first lens for condensing the laser beam as a parallel beam, and a first beam splitter(3) for splitting the parallel beam into a pair of beams. A transmission unit includes a first optical fiber(5) for transmitting one of the beam pair as a reference light source and a second optical fiber(6) for transmitting the other one of the beam pair as a reference light source. A measurement unit includes a lens(10) for outputting a reference beam, a second lens(11) for outputting the laser beam as the parallel beam, a second beam splitter(12) for inducing the beam to an object lens(200) through the second lens, the object lens for forming an object beam by reflecting the laser beam on a sample(300), a beam combiner(13) for combining the object beam with the reference beam, and an image pickup device(100) for projecting a hologram.
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