APPARATUS FOR FORMING PATTERN AND METHOD FOR FORMING PATTERN

摘要

A pattern forming device and a pattern formation method which adhesively installs a stamp and a substrate and controls the space of the substrate the attached stamp are provided to decrease row material consumption cost and increase product production efficiency by minimizing products production failure rate. A first chamber attaches a stamp in which a pattern is formed(110). A second chamber supports the substrate which is faced with stamp(120). A pressurization control part sets up the first chamber, adds pressure to the central part of stamp, and is contacted with substrate from the central part of stamp(130). A lifting operation part in which the substrate contacted with the central part of stamp is attached to stamp(140). A pressure conditioning pump provides gas(151). The pressure control pipe which is connected to the pressure conditioning pump and guides the gas in the second chamber inside(152).