发明名称 |
Low-voltage micro-switch actuation technique |
摘要 |
An electro-mechanical switch structure includes at least one fixed electrode and a free electrode which is movable in the structure with a voltage potential applied between each fixed electrode and the free, movable electrode. The voltage potentials applied between each fixed electrode and the movable electrode are modulated to actuate the electro-mechanical switch structure.
|
申请公布号 |
US7486163(B2) |
申请公布日期 |
2009.02.03 |
申请号 |
US20040979350 |
申请日期 |
2004.11.02 |
申请人 |
MASSACHUSETTS INSTITUTE OF TECHNOLOGY |
发明人 |
NIELSON GREGORY N.;BARBASTATHIS GEORGE |
分类号 |
H01H51/22;H01H47/00;H01H59/00 |
主分类号 |
H01H51/22 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|