发明名称 Integrated circuit cooling and insulating device and method
摘要 A method and device for cooling an integrated circuit is provided. A method and device using a gas to cool circuit structures such as a number of air bridge structures is provided. A method and device using a boiling liquid to cool circuit structures is provided. Further provided is a method of controlling chip temperature. This allows circuit and device designers an opportunity to design more efficient structures. Some properties that exhibit less variation when temperature ranges are controlled include electromigration, conductivity, operating speed, and reliability.
申请公布号 US7485497(B2) 申请公布日期 2009.02.03
申请号 US20070977524 申请日期 2007.10.25
申请人 MICRON TECHNOLOGY, INC. 发明人 FARRAR PAUL A.;FORBES LEONARD;AHN KIE Y.;GEUSIC JOSEPH E.;BHATTACHARYYA ARUP;REINBERG ALAN R.
分类号 H01L21/00 主分类号 H01L21/00
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