发明名称 |
Light modulating mirror device and array |
摘要 |
A deformable reflector includes a plurality of MEMS devices, each having an electrode membrane having a reflective surface thereon, a flat surface, and a pulldown electrode formed in the flat substrate. The electrode membrane has substantially a same flatness of the flat substrate when the electrode membrane comes into contact with the flat substrate across a majority of its surface area in response to a voltage being applied to the pulldown electrode. The electrode membrane has a two-dimensional curvature when no voltage is applied to the pulldown electrode.
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申请公布号 |
US7484857(B2) |
申请公布日期 |
2009.02.03 |
申请号 |
US20040000427 |
申请日期 |
2004.11.30 |
申请人 |
MASSACHUSETTS INSTITUTE OF TECHNOLOGY |
发明人 |
BOZLER CARL O.;LYONS W. GREGORY;MULDAVIN JEREMY B. |
分类号 |
G02B5/122;G01J5/02;G02F1/03 |
主分类号 |
G02B5/122 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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