发明名称 |
Single-crystal-silicon 3D micromirror |
摘要 |
In a 3D free space micromirror device, a mirror plate is joined with actuators through flexible springs where the other ends of the actuators have fixed support on the substrate. Single crystal silicon and aluminum are used as bi-morph materials with silicon dioxide providing electrical isolation between the two. Thickness variation in the microstructure is achieved by two-step p-n junction formed in a p-type substrate. Thick and thin n-silicon layer formation and DRIE cut mechanisms are employed in such a way that all the thick and thin silicon components of the structure are released simultaneously avoiding overetch which can be detrimental to the thin flexural springs. Working prototypes of the device have been found suitable for any optical switching array architecture where deflections up to 10 degrees are required.
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申请公布号 |
US7486430(B2) |
申请公布日期 |
2009.02.03 |
申请号 |
US20060345891 |
申请日期 |
2006.02.02 |
申请人 |
AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH |
发明人 |
GAN CHIH KIONG TERENCE;AGARWAL AJAY;SINGH JANAK;ZHANG XIAOLIN |
分类号 |
G02B26/00;G02B26/08;H01L21/00;H01L21/302 |
主分类号 |
G02B26/00 |
代理机构 |
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