| 摘要 |
A fabricating method of field emission triodes is provided. First, a cathode conductive layer, an insulator layer, and a gate layer are formed on a substrate. An opening is formed in the insulator layer and the gate layer to expose a portion of the cathode conductive layer. A metal layer is formed on the cathode conductive layer. A first anodization is performed so as to form a first metal anodization layer from a portion of the metal layer. After the first metal anodization layer is removed, a second metal anodization layer having a plurality of pores is formed. Thereafter, a catalyst layer is formed in the pores. Then, a plurality of carbon nanotubes are formed in the pores.
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