Refrigerant gas recycling apparatus for cryogenic cooling device

摘要

A refrigerant gas recycling apparatus for cryogenic cooling device has a first gas storage unit for temporarily storing refrigerant gas discharged from the cryogenic cooling device, a compressor for compressing refrigerant gas stored in the first storage unit, and a second gas storage unit for storing therein refrigerant gas compressed by the compressor and selectively re-supplying compressed refrigerant gas to the cryogenic cooling device using a pressure difference between compressed refrigerant gas and inside of the cooling device. Refrigerant gas discharged from the cryogenic cooling device is compressed and stored in reduced volume, and stored refrigerant gas is re-supplied to the cryogenic cooling device without a separate driving source.