发明名称 Electronic parts cleaning solution
摘要 (Object) To provide a new electronic parts cleaning solution that inhibits the corrosion of silicon or metals other than the silicon, and that efficiently cleans off fine dust or organic matters adhered on the surface of electronic parts, and that does not have white turbidity easily. (Solution) An electronic parts clearing solution which is characterized in containing an anionic surfactant, hydroxide, metal corrosion inhibitor, water, and a nonionic surfactant represented by formula (I) and/or a nonionic surfactant represented by formula (II): <?in-line-formulae description="In-line Formulae" end="lead"?>HO-((EO)x-(PO)y)z-H (I)<?in-line-formulae description="In-line Formulae" end="tail"?> <?in-line-formulae description="In-line Formulae" end="lead"?>R-[((EO)a-(PO)b)c-H]m (II)<?in-line-formulae description="In-line Formulae" end="tail"?> (EO is an oxyethylene group, and PO is an oxypropylene group. x and y, and a and b are positive number, which x(x+y) and a(a+b) are 0.05 to 0.5 respectively, and z and c are positive integers. R is a residue group wherein hydrogen atoms are removed from hydroxyl group of alcohol or amine represented by a group having valency of 1~4).
申请公布号 US7485612(B2) 申请公布日期 2009.02.03
申请号 US20050174061 申请日期 2005.06.30
申请人 DONGWOO FINE-CHEM CO., LTD. 发明人 TAKASHIMA MASAYUKI
分类号 H01L21/00 主分类号 H01L21/00
代理机构 代理人
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