发明名称 Fabrication method of an non-volatile memory
摘要 A non-volatile memory cell is provided. The non-volatile memory includes a substrate, a gate stacked layer, an isolation layer and a conductive layer. The gate stacked layer includes a tunneling layer, a charge trapping layer, a barrier layer and a control gate layer sequentially stacked over the substrate, and the stacked gate layer has an opening therein through these layers. The isolation layer is located on the surface of the opening. The conductive layer is disposed in the opening to cover the isolation layer.
申请公布号 US7485533(B2) 申请公布日期 2009.02.03
申请号 US20060549639 申请日期 2006.10.14
申请人 UNITED MICROELECTRONICS CORP. 发明人 LEE TZYH-CHEANG
分类号 H01L21/336 主分类号 H01L21/336
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