| 摘要 |
Various systems and methods for sensing are provided. In one embodiment, a sensing system is provided that includes a first electrode array disposed on a proof mass, and a second electrode array disposed on a planar surface of a support structure. The proof mass is attached to the support structure via a compliant coupling such that the first electrode array is positioned substantially parallel to and faces the second electrode array, where the proof mass is capable of displacement relative to the support structure. The displacement of the proof mass is in a direction substantially parallel to the second electrode array. The first electrode array comprises a plurality of first patterns of electrodes, the first patterns being interdigitated, and each of the first patterns comprises at least two first electrodes. The second electrode array comprises a plurality of second patterns of electrodes, the second patterns being interdigitated. Each of the second patterns comprising at least three second electrodes, where corresponding ones of the second electrodes in the second patterns are coupled in common.
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