发明名称 Method of forming a film with linear droplets and an applied temperature gradient
摘要 Provided is a method for forming a film by which a highly accurate film pattern can easily be formed out of droplets. The method includes forming linear droplets on a surface of a substrate, providing a temperature gradient onto surfaces of the linear droplets, and forming a dry film including a straight part at an end section of the linear droplets. In order to provide a temperature gradient onto surfaces of the linear droplets, the substrate, on which the droplet is sprayed, is bridged between a hot plate and cooling plate.
申请公布号 US7485347(B2) 申请公布日期 2009.02.03
申请号 US20040959998 申请日期 2004.10.08
申请人 SEIKO EPSON CORPORATION 发明人 MASUDA TAKASHI;TODOROKIHARA MASAYOSHI
分类号 B05D1/40;B05D3/02;B05D3/00;B05D7/00;B41M3/00;H01L51/40 主分类号 B05D1/40
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