| 摘要 |
A micro tool is provided to lower the manufacturing cost by reducing the size of diameter. Therefore the switching frequency due to the tool breakage can be reduced by improving the intensity. A micro tool is coated among the physical vapor deposition through one or more method, and the diameter of the micro tool is the hundreds micrometer(mum) through the several tens. The micro tool is coated with the ceramics material. The ceramic coating material is the alumina(Al203). The physical vapor deposition is selected over one at least among the sputtering method, the ion beam evaporating method, the thermal evaporating method and the pulsed laser deposition method.
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