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发明名称
METHOD OF FABRICATING SEMICONDUCTOR DEVICE
摘要
申请公布号
KR100881382(B1)
申请公布日期
2009.02.02
申请号
KR20070042946
申请日期
2007.05.03
申请人
发明人
分类号
H01L27/105;H01L21/02;H01L21/314;H01L21/8246;H01L27/115
主分类号
H01L27/105
代理机构
代理人
主权项
地址
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