METHOD FOR DISPLAYING SEMICONDUCTOR MANUFACTURE PROCESS

摘要

A method for displaying a semiconductor manufacture process is provided to rapidly aware the situation of progress of semiconductor device by displaying the color of processing chambers in which wafer is inputted. A plurality of processing chambers in which a wafer is inputted and a plurality of ambient chambers which the wafer queues are indicated on a screen(S10). The ambient chamber is indicated by the different color when the wafer is taken into the ambient chamber from outside(S20). When the wafers taken into the ambient chambers are taken into the processing chambers, the processing chamber is indicated identically with the color of the ambient chamber(S30) in order to confirm the chamber where the wafers taken into processing chambers.