A plasma generator is provided to facilitate operation by controlling a plasma repetition rate and the energy delivered to the plasma. A plasma repetition rate and the plasma energy are inputted to an external input unit(10). An interface(30) stores and converts the input signal inputted from the input unit. A power supply unit(20) receives the energy size and frequency information from the interface and supplies the power. A frequency oscillator(40) receives the power from the power supply unit and oscillates the radio frequency or the microwave frequency. The frequency having the energy of the constant size oscillated from the frequency oscillator is transmitted through the transmission line(50). A plasma reactor(100) generates the plasma by reacting the plasma gas injected from a gas supply unit with the electric field induced by the energy with the frequency transmitted though the transmission line.
