Large area substrate carrying device,申请号KR20070012664U-传众专利搜索

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发明名称	Large area substrate carrying device
摘要
申请公布号	KR20090001131(U)	申请公布日期	2009.02.02
申请号	KR20070012664U	申请日期	2007.07.27
申请人		发明人
分类号	H01L21/677	主分类号	H01L21/677
代理机构		代理人
主权项
地址

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