TEMPERATURE COMPENSATED CRYSTAL OSCILLATOR EMBEDED MEMS SWITCH AND METHOD FOR FABRICATING THE SAME

摘要

An MEMS(Micro-Electro Mechanical System) switch embedded temperature crystal oscillator and a manufacturing method thereof are provided to simplify a manufacturing process by implementing the MEMS switch and the temperature compensated crystal oscillator in one ceramic package. An MEMS switch(120) is mounted in a first cavity(110) formed in a lower part of a ceramic package(100). A crystal oscillator(140) is mounted in a second cavity(130) formed in an upper part of the ceramic package. An IC(160) for compensating for the temperature is mounted in a third cavity(150) formed in the lower part of the second cavity. A first shielding case(170) is bonded in the upper part of the ceramic package to protect the crystal oscillator. A second shielding case(180) is boned in the lower part of the ceramic package to protect the MEMS switch.