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发明名称
PLASMA ETCHING METHOD, PLASMA ETCHING APPARATUS, COMPUTER RECORDING MEDIUM, AND RECORDING MEDIUM IN WHICH PROCESS RECIPE IS RECORDED
摘要
申请公布号
KR100880746(B1)
申请公布日期
2009.02.02
申请号
KR20070030488
申请日期
2007.03.28
申请人
发明人
分类号
H01L21/3065
主分类号
H01L21/3065
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代理人
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