APPARATUS FOR FILTERING AIR AND CLEANING SYSTEM OF SEMICONDUCTOR MANUFACTURING EQUIPMENT USED THE SAME

摘要

An apparatus for filtering air including air interrupter and a cleaning system of semiconductor manufacturing facility including the same are provided to block many particles and to increase productivity by installing a second air filtering device and a second blower. A main frame(31) of a second air filtering device(30) has an opening connected to an air supplying line. A buffer frame(33) is inserted in the main frame. A plurality of slots(35) includes a plurality of air entrances(37). A plurality of filters(39) is positioned on a plurality of slots, and filters pollution material contained in an air. An air interrupter(43) controls the air coming through the air entrances in exchanging a plurality of filters, and includes a slide panel.