发明名称 THIN FILM TRANSISTOR AND MANUFACTURING METHOD THEREOF
摘要 <p>A thin film transistor capable of performing high luminance, high resolution, and fast response speed, and manufacturing method thereof are provided to perform display device having flexible property by forming thin film transistor on graphite substrate flat-processed with polyimide or silicate. A thin film transistor includes a gate electrode, a source electrode, and a drain electrode formed on a substrate. The substrate is a graphite substrate(11) having flexible property. The thin film transistor includes a flat layer(21). The flat layer is formed by flattening an irregular surface of the graphite substrate with polyimide or silicate using spin coating or chemical mechanical polishing method.</p>
申请公布号 KR100880155(B1) 申请公布日期 2009.01.23
申请号 KR20070081237 申请日期 2007.08.13
申请人 UNIVERSITY-INDUSTRY COOPERATION GROUP OF KYUNG HEE UNIVERSITY 发明人 JANG, JIN;CHEON, JUN HYUK;BAE, JUNG HO;LEE, WON GYU
分类号 H01L29/786 主分类号 H01L29/786
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