| 摘要 |
A probe structure and a forming method thereof are provided to enable only a stud of a needle to be inserted into a guide, thereby improving integration of the probe structure for probe card. A substrate(200) in which an electrode(220) is formed is prepared. A stud(560) of a needle(500) functioning as a probe for delivering an electric signal from an arbitrary terminal of a semiconductor chip is manufactured. In order to support the stud of the needle, a guide(300) in which a hole(320) inserted with the stud is formed is manufactured. A beam(520) and tip(540) of the needle are integrally manufactured. The stud of the needle and the substrate are bonded. The stud of the needle and the beam of the needle are bonded. Therefore, the substrate and the needle are connected. The substrate comprises multilayer ceramic. A protective layer including a parylene component is formed on the multilayer ceramic substrate.
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