MANUFACTURING METHOD OF NANO SIZED WIRE

摘要

A manufacturing method of nano wire is provided to synthesize effectively gallium-doped zinc oxide nano wire of a stack shape using gallium-doped zinc oxide target. A manufacturing method of nano wire comprises steps of: depositing catalyst metal on a substrate; and vaporizing zinc oxide with dopant, evaporating the zinc oxide on the substrate in which the catalyst metal is evaporated and forming a nano wire of the zinc oxide. The catalyst metal is gold(Au). The substrate is a sapphire substrate. The dopant is gallium.