| 摘要 |
<P>PROBLEM TO BE SOLVED: To obtain desired drive performance by effectively preventing the resonance of a mobile object which is driven by the elliptic oscillation of an oscillator. <P>SOLUTION: Oscillators 320x and 320y, which generate elliptic oscillation, are used as drive sources. On the other hand, it is made in separate structure which is composed of first mobile objects 301 and 38 made in desired size, on the sides of the mobile objects 311x and 311y, as the objects of shift, and second mobile objects 330x and 330y smaller than them, and they are fixed thereby being integrated. Furthermore, it is equipped with interposed members 350x and 350y which are interposed between the first mobile objects 301 and 38 and the second mobile objects 330x and 330y. Thereby, the interposed members 350x and 350y prevent the oscillation of the same frequency as the drive frequency of the oscillators 320x and 320y from being transmitted to the first mobile objects 301 and 38, and shift the natural oscillation of the first mobile objects 301 and 38 from the drive frequency of the oscillators 320x and 320y. <P>COPYRIGHT: (C)2009,JPO&INPIT |
