| 摘要 |
PROBLEM TO BE SOLVED: To provide a sealing method permitting the transmission of electron beams and holding a vacuum for one year without a pump. SOLUTION: A helium leak-tight film is metal-sealed on a flange to form a helium leak-tight device. The metal-sealing is actualized in such a manner that (I) an air-tight side sealing block, (1I) a metal gasket softer than each of a sealing block materia and a sealed film, (2III) the sealed film, (3IV) a high-pressure side sealing block are (4) built up in sequence and sealed. COPYRIGHT: (C)2009,JPO&INPIT
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