发明名称 Mems Gyroscope with output oscillation about the normal to the plane
摘要 A gyroscope that lies generally in a plane, for detecting rotation rate about a gyro input axis. The gyroscope has a substrate, and a generally planar outer member flexibly coupled to the substrate such that it is capable of oscillatory motion about a drive axis that is orthogonal to the input axis. There is also a generally planar inner member coplanar with and flexibly coupled to the outer member such that it is capable of rotary oscillatory motion relative to the outer member about an output axis that is orthogonal to the plane of the members. There are one or more drives for directly or indirectly oscillating the outer member about the drive axis, and one or more sensors that detect oscillation of the inner member about the output axis.
申请公布号 US2009019932(A1) 申请公布日期 2009.01.22
申请号 US20080185626 申请日期 2008.08.04
申请人 CARDARELLI DONATO 发明人 CARDARELLI DONATO
分类号 G01C19/00 主分类号 G01C19/00
代理机构 代理人
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