Stepping Actuator and Method of Fabrication

摘要

The current invention provides a stepping actuator, achieving large range up to ±35 mum with low operating voltages of 15V or lower and large output forces of up to ±110 muN. The actuator has an in-plane-angular deflection conversion which allows achieving step sizes varying from few nanometers to few micrometers with a minor change in the design. According to certain embodiments of the invention, the stepping actuator comprises a geometrical structure with a displacement magnification ratio of between 0.15 and 2 at operating voltages of 15V or lower. The present invention also provides a method for forming such stepping actuators.