发明名称 SEMICONDUCTOR DEVICE TESTER AND METHOD FOR TESTING SEMICONDUCTOR DEVICE TESTER USING THE SAME
摘要 A semiconductor test apparatus and a semiconductor device test method using the same are provided to increase the number of IO(Input/Output) terminals of DUT(Device Under Test) more than the number of IO card of a test device by detecting a fault DUT among one or more DUTs according to output voltage of a voltage divider. A semiconductor test device(100) comprises a test signal generator(110), a voltage divider(120) and a data comparing part(130). The test signal generator produces input test data. The test signal generator applies the input test data to one or more DUTs (200a,200b) connected in parallel. The voltage divider distributes a difference of a voltage level of output test data read out from the one or more DUTs. The data comparing part comprises one or more comparators(120a,120b,120c). The comparators have different critical values. The data comparing part detects a fault DUT among one or more DUTs based on comparison between the output voltage level of the voltage divider and a critical value corresponding to reference date.
申请公布号 KR20090008595(A) 申请公布日期 2009.01.22
申请号 KR20070071660 申请日期 2007.07.18
申请人 MEMORY & TESTING INC. 发明人 KANG, KYUNG SUK
分类号 G01R31/3183;G01R31/26;H01L21/66 主分类号 G01R31/3183
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