发明名称 |
STAGE DEVICE, ITS LIFTING CONTROL METHOD, AND EXPOSURE DEVICE USING STAGE DEVICE |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a small stage device capable of ultraprecise positioning. <P>SOLUTION: This stage device 1 comprises: a fixation base 2 having lifting electromagnets 4 arranged to face a movable base 3 at least three by three; the movable base 3 supported by the lifting electromagnets 4 by a noncontact magnetic lifting method; gap sensors 12 for lifting control provided for the movable base 3; a two-dimensional linear sensor 8 arranged at the center of the movable base 3; and linear motors 5 driving the movable base 3. The stage device is also provided with optical measurement means 51, 52 and 53 detecting a position in the vicinity of the position of the center of gravity of the movable base 3. <P>COPYRIGHT: (C)2009,JPO&INPIT |
申请公布号 |
JP2009016678(A) |
申请公布日期 |
2009.01.22 |
申请号 |
JP20070178862 |
申请日期 |
2007.07.06 |
申请人 |
YASKAWA ELECTRIC CORP |
发明人 |
MURAKAMI SATOSHI;TOMINAGA RYUICHIRO;MATSUO TOSHIHIRO |
分类号 |
H01L21/027;G03F7/20;H01L21/68 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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