| 摘要 |
PROBLEM TO BE SOLVED: To provide an air conditioning system in a clean carrying device, capable of reducing equipment cost and running cost, by forming a local and efficient down-flow by the installation number of necessary minimum fan filter units, by enhancing an exhaust flow speed by the down-flow of only a required place, by following a travel position and/or a stopping position of a carrying carriage. SOLUTION: This clean carrying device has a storage shelf L storing a cassette K storing a liquid crystal substrate, the carrying carriage C carrying the cassette K along a travel rail R, and a fan filter unit FFU supplying clean air to the storage shelf L, and is adjustably constituted so as to increase a flow speed of the down-flow of the travel position and/or the stopping position of the carrying carriage C, by following the travel position and/or the stopping position of the carrying carriage C capable of traveling in the down-flow. COPYRIGHT: (C)2009,JPO&INPIT |
