| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin-film magnet that suppresses deterioration in characteristics caused by reduction in volume, is in a thin-film shape, operates as a permanent magnet effectively, and can be micromachined easily, and to provide a method of manufacturing the same. SOLUTION: In the thin-film magnet, an Sm-Co alloy-based thin film containing Cu as an additional element is directly laminated on a substrate made of silicon or the like by a sputtering method or the like. The Cu is added to enhance the crystal orientation property of the Sm-Co alloy-based thin film. By setting Cu and Sm in the Sm-Co alloy-based thin film within a range for satisfying 2 at.%≤Cu≤13 at.%, Sm≥7 at.%, 11 Sm-8Cu≤94 at.%, deterioration in characteristics caused by reduction in volume can be minimized and crystal magnetic anisotropy can be maximized by enhancing crystal orientation properties. In addition, affinity to other thin-film processes increases by film formation using a thin-film process, such as a sputtering method, so that micromachining is made easy. COPYRIGHT: (C)2009,JPO&INPIT
|
