发明名称 PLATE-LIKE BODY COOLING APPARATUS AND HEAT TREATMENT SYSTEM
摘要 PROBLEM TO BE SOLVED: To provide a plate-like body cooling apparatus cooling a heat-treated plate-like body or the like efficiently with the apparatus made small-sized. SOLUTION: The plate-like body cooling apparatus 1 has a plate-like body arranging part 11 in which the plate like-body 90 is arranged, an upper side cooling part 20 and a lower side cooling part 30. The upper side cooling part 20 and the lower side cooling part 30 are arranged respectively on the upper and lower side of the plate-like body arranging part 11 and are provided with inner side plates 21, 31, outer side plates 22, 32 and fans 29, 39 correspondingly. wherein first through-holes 28, 38 formed by cylindrical bodies 26, 36 to communicate the inside plates 21, 31 and the outside plates 22, 32 with each other and second through-holes 25, 35 penetrating the inside plates 21, 31 are formed through the whole area. The outside air is passed through the first through-holes 28, 38 to cool the plate-like body 90 and is discharged from the second through-hole 25, 35 to the outside through intermediate spaces 23, 33 by operating fans 29, 39. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009013031(A) 申请公布日期 2009.01.22
申请号 JP20070179003 申请日期 2007.07.06
申请人 ESPEC CORP 发明人 KANDA TOSHIRO
分类号 C03B25/00;F27D9/00;H01L21/027 主分类号 C03B25/00
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