发明名称 |
ELECTRON SOURCE MANUFACTURING METHOD |
摘要 |
An electron source excellent in the uniformity in current emission distribution is provided certainly and at a low cost A process for producing an electron source having an electron emitting portion at one end of a rod which comprises a step of forming the electron emitting portion by machining, and a step of removing a damaged layer at the surface of the formed electron emitting portion by chemical polishing or electrolytic polishing.
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申请公布号 |
US2009023355(A1) |
申请公布日期 |
2009.01.22 |
申请号 |
US20060813963 |
申请日期 |
2006.01.13 |
申请人 |
DENKI KAGAKU KOGYO KABUSHIKI KAISHA |
发明人 |
SAKAWA SEIICHI;TERUI YOSHINORI |
分类号 |
H01J9/04 |
主分类号 |
H01J9/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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