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发明名称
WIEDERHOLTE PROJEKTION EINES MASKENMUSTERS UNTER VERWENDUNG EINER ZEITSPARENDEN HÖHENMESSUNG
摘要
申请公布号
DE69839069(T2)
申请公布日期
2009.01.22
申请号
DE19986039069T
申请日期
1998.12.11
申请人
ASML NETHERLANDS B.V.
发明人
LOOPSTRA, ERIK ROELOF
分类号
G03F9/00;G03F7/20;G03F7/207;H01L21/027
主分类号
G03F9/00
代理机构
代理人
主权项
地址
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