| 摘要 |
PROBLEM TO BE SOLVED: To execute focusing from the vicinity of an edge of a reform object by carrying out auto-focusing by considering distortion of a surface of the reform object as a correction value, and to uniformly reform the whole of an area of the reform object requiring reforming. SOLUTION: This laser irradiation device is provided with: a focusing means (a piezoelectric element 2 vertically driving a lens 20) focusing a laser spot on a reform object 18; an X-Y table drive means 15 for moving the laser spot 17 in an X-Y plane direction; an external controlled variable detection means detecting an external controlled variable including distortion based on light of the laser spot reflected from the surface of the reform object and based on a focus error signal on the basis of the X-Y coordinates of the reform object surface by scanning a laser spot of laser power without reforming the reform object; and a focusing means starting scanning of the laser spot toward the reform object from the outside of a mounting position of the reform object 18 on a table 80, and focusing the laser spot on the reform object surface by using, as an external correction amount, the external correction value on the basis of the X-Y coordinates detected by an external correction amount detection means when detecting the light reflected from the reform object surface. COPYRIGHT: (C)2009,JPO&INPIT
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