| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrode member manufacturing method for forming an inexpensive and highly accurate pattern which has a thin film on a ceramic, silicon or glass substrate and high adhering strength. SOLUTION: The electrode manufacturing method comprises steps of forming an aluminum paste layer containing aluminum powder A and a binding resin C on the substrate and forming a resist film on the aluminum paste layer formed on the substrate to form a laminate with the aluminum paste layer and the resist film on the substrate, applying exposure treatment to the resist film of the laminate to form the latent image of a resist pattern, applying developing treatment to the resist film to actualize the resist pattern, applying etching treatment to the aluminum paste layer to form the pattern of the aluminum paste layer corresponding to the resist pattern, and then applying firing treatment to the pattern. The contained aluminum powder A is an aluminum powder of D50: 2-20μm. COPYRIGHT: (C)2009,JPO&INPIT
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